Spatial charge effects in retarding field analyzer ion measurements in a cathodic vacuum arc
The ion energy distribution (IED) obtained from a cathodic vacuum arc using a retarding field analyzer (RFA) was investigated. The spatial charge effects in the grid-collector region of the analyzer were taken into account in the RFA ion measurements. It was found that there was a decrement of colle...
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| Autor principal: | |
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| Otros Autores: | , |
| Formato: | Capítulo de libro |
| Lenguaje: | Inglés |
| Publicado: |
2001
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| Acceso en línea: | Registro en Scopus DOI Handle Registro en la Biblioteca Digital |
| Aporte de: | Registro referencial: Solicitar el recurso aquí |
| Sumario: | The ion energy distribution (IED) obtained from a cathodic vacuum arc using a retarding field analyzer (RFA) was investigated. The spatial charge effects in the grid-collector region of the analyzer were taken into account in the RFA ion measurements. It was found that there was a decrement of collector current for unexpected collector bias voltage values. Spatial charge effects were found to be more marked when the arc operated with gas filling due to creation of low energy gaseous ions. |
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| ISSN: | 00036951 |
| DOI: | 10.1063/1.1380402 |