Reliability of High Mobility SiGe Channel MOSFETs for Future CMOS Applications
Due to the ever increasing electric fields in scaled CMOS devices, reliability is becoming a showstopper for further scaled technology nodes. Although several groups have already demonstrated functional Si channel devices with aggressively scaled Equivalent Oxide Thickness (EOT) down to 5Ã., a 10 ye...
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Autor principal: | |
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Otros Autores: | , |
Formato: | Libro electrónico |
Lenguaje: | Inglés |
Publicado: |
Dordrecht :
Springer Netherlands : Imprint: Springer,
2014.
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Colección: | Springer Series in Advanced Microelectronics,
47 |
Materias: | |
Acceso en línea: | http://dx.doi.org/10.1007/978-94-007-7663-0 |
Aporte de: | Registro referencial: Solicitar el recurso aquí |
Tabla de Contenidos:
- 1 Introduction
- 2 Degradation mechanisms
- 3 Techniques and devices
- 4 Negative Bias Temperature Instability in (Si)Ge pMOSFETs
- 5 Negative Bias Temperature Instability in nanoscale devices
- 6 Channel Hot Carriers and other reliability mechanisms
- 7 Conclusions and perspectives.